JPH0366673U - - Google Patents
Info
- Publication number
- JPH0366673U JPH0366673U JP12653089U JP12653089U JPH0366673U JP H0366673 U JPH0366673 U JP H0366673U JP 12653089 U JP12653089 U JP 12653089U JP 12653089 U JP12653089 U JP 12653089U JP H0366673 U JPH0366673 U JP H0366673U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- processed
- spin chuck
- substrate holder
- blowing means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 2
- 238000007664 blowing Methods 0.000 claims 3
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12653089U JPH0366673U (en]) | 1989-10-31 | 1989-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12653089U JPH0366673U (en]) | 1989-10-31 | 1989-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0366673U true JPH0366673U (en]) | 1991-06-28 |
Family
ID=31674336
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12653089U Pending JPH0366673U (en]) | 1989-10-31 | 1989-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0366673U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011014588A (ja) * | 2009-06-30 | 2011-01-20 | Ulvac Seimaku Kk | 塗布装置及び気流制御板 |
-
1989
- 1989-10-31 JP JP12653089U patent/JPH0366673U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011014588A (ja) * | 2009-06-30 | 2011-01-20 | Ulvac Seimaku Kk | 塗布装置及び気流制御板 |